Title:
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2006059959
Kind Code:
A
Abstract:
To provide a semiconductor device comprising a shield layer capable of reducing the drop of the inductance of a spiral inductor.
The semiconductor device comprises a semiconductor substrate where an electronic circuit formed of semiconductor elements is formed, a spiral inductor formed on the semiconductor substrate, and a shield layer which is formed between the semiconductor substrate and the spiral inductor and has a plurality of openings formed radially from the center to the outer edge.
More Like This:
JP2007501513 | Voltage supply structure and method |
JPH06101551 | [Title of Invention] CMOS integrated circuit device |
JP3152561 | SEMICONDUCTOR INTEGRATED CIRCUIT |
Inventors:
ANZAI NORIO
Application Number:
JP2004239305A
Publication Date:
March 02, 2006
Filing Date:
August 19, 2004
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/822; H01F17/00; H01F41/04; H01L27/04
Domestic Patent References:
JP2000022085A | 2000-01-21 | |||
JP2002299554A | 2002-10-11 | |||
JPH06181289A | 1994-06-28 | |||
JP2004519844A | 2004-07-02 | |||
JPH08172161A | 1996-07-02 | |||
JPH07235640A | 1995-09-05 | |||
JP2003243570A | 2003-08-29 | |||
JP2002368118A | 2002-12-20 | |||
JP2002353327A | 2002-12-06 | |||
JP2003332423A | 2003-11-21 | |||
JP2003133546A | 2003-05-09 |
Attorney, Agent or Firm:
Global IP Tokyo Patent Business Corporation
Previous Patent: STRUCTURE OF SEMICONDUCTOR PACKAGE AND METHOD OF MANUFACTURING SEMICONDUCTOR PACKAGE
Next Patent: SEMICONDUCTOR LASER
Next Patent: SEMICONDUCTOR LASER