Title:
SEMICONDUCTOR DEVICE AND METHOD FOR SEARCHING FOR PREDETERMINED POSITION ON THE SAME
Document Type and Number:
Japanese Patent JP2005051230
Kind Code:
A
Abstract:
To provide a semiconductor device and a method of searching for a predetermined position on the semiconductor device.
In order to provide a semiconductor device on which a desired position can be located easily and a method for searching for a predetermined position on the semiconductor device, the semiconductor device is configured using indication lines or an indication pattern together with a dummy pattern or a reference plane.
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Inventors:
JUNG JIN KOOK
KIM HARK-MOO
KIM HARK-MOO
Application Number:
JP2004207746A
Publication Date:
February 24, 2005
Filing Date:
July 14, 2004
Export Citation:
Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H01L21/30; H01L21/304; H01L21/3205; H01L21/66; H01L21/822; H01L23/52; H01L23/544; H01L27/04; H01L21/321; (IPC1-7): H01L21/66; H01L21/3205; H01L21/822; H01L27/04
Domestic Patent References:
JP2004282071A | 2004-10-07 | |||
JPH09306910A | 1997-11-28 | |||
JP2003142583A | 2003-05-16 | |||
JP2002208676A | 2002-07-26 | |||
JP2001156072A | 2001-06-08 |
Foreign References:
WO2004082012A1 | 2004-09-23 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Takashi Watanabe
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