Title:
半導体装置
Document Type and Number:
Japanese Patent JP4672435
Kind Code:
B2
Inventors:
Inner Money Kyotaka
Masao Kuriyama
Chen Akatsuki
Masao Kuriyama
Chen Akatsuki
Application Number:
JP2005148286A
Publication Date:
April 20, 2011
Filing Date:
May 20, 2005
Export Citation:
Assignee:
Toshiba Corporation
Toppan Printing Co., Ltd.
Toshiba Memory Systems Co., Ltd.
Toppan Printing Co., Ltd.
Toshiba Memory Systems Co., Ltd.
International Classes:
G11C16/06; H01L21/822; H01L27/04
Domestic Patent References:
| JP11238391A | ||||
| JP11186503A | ||||
| JP5217372A |
Foreign References:
| WO2003043014A1 |
Attorney, Agent or Firm:
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Tetsuya Kazama
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen