Title:
SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JP2003007723
Kind Code:
A
Abstract:
To enable further refinement of element structure beyond the refinement limit of the conventional method and thereby realize a higher performance of a semiconductor integrated circuit (LSI).
The semiconductor element and the semiconductor integrated circuit using the same which has a structure comprising lower-concentration impurity regions than the impurity concentrations of the source and the drain. These regions are formed between the source and a channel beneath gate and between the drain and the channel in an asymmetric shape with respect to the center line along which the gate extends.
Inventors:
ARIMA YUTAKA
Application Number:
JP2001192887A
Publication Date:
January 10, 2003
Filing Date:
June 26, 2001
Export Citation:
Assignee:
KITAKYUSHU FOUNDATION
International Classes:
H01L21/336; H01L21/8234; H01L21/8238; H01L27/088; H01L27/092; H01L29/06; H01L29/78; (IPC1-7): H01L21/336; H01L21/8234; H01L21/8238; H01L27/088; H01L27/092; H01L29/78
Domestic Patent References:
JPH06350088A | 1994-12-22 | |||
JPH11103054A | 1999-04-13 | |||
JPH10256562A | 1998-09-25 | |||
JPH0493038A | 1992-03-25 | |||
JPH10189954A | 1998-07-21 | |||
JPH043468A | 1992-01-08 |
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