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Title:
SEMICONDUCTOR ELEMENT AND SEMICONDUCTOR INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JP2003007723
Kind Code:
A
Abstract:

To enable further refinement of element structure beyond the refinement limit of the conventional method and thereby realize a higher performance of a semiconductor integrated circuit (LSI).

The semiconductor element and the semiconductor integrated circuit using the same which has a structure comprising lower-concentration impurity regions than the impurity concentrations of the source and the drain. These regions are formed between the source and a channel beneath gate and between the drain and the channel in an asymmetric shape with respect to the center line along which the gate extends.


Inventors:
ARIMA YUTAKA
Application Number:
JP2001192887A
Publication Date:
January 10, 2003
Filing Date:
June 26, 2001
Export Citation:
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Assignee:
KITAKYUSHU FOUNDATION
International Classes:
H01L21/336; H01L21/8234; H01L21/8238; H01L27/088; H01L27/092; H01L29/06; H01L29/78; (IPC1-7): H01L21/336; H01L21/8234; H01L21/8238; H01L27/088; H01L27/092; H01L29/78
Domestic Patent References:
JPH06350088A1994-12-22
JPH11103054A1999-04-13
JPH10256562A1998-09-25
JPH0493038A1992-03-25
JPH10189954A1998-07-21
JPH043468A1992-01-08