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Title:
SEMICONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JP2005311276
Kind Code:
A
Abstract:

To provide a semiconductor element, capable of suppressing leakage current deepened by the generation of active moat, when applying an STI process.

A method for manufacturing the semiconductor element comprises the steps of forming an element-isolating film 30 by an STI (Shallow-Trench Isolation) process to obtain a microscopic element separation pitch, forming a plurality of gates 34 so as to pass through an active region 32 limited by the element isolating film, and forming a subgate 36 having a length relatively larger than the part but a boundary part on the side of a part adjacent to the boundary between the active region and the element separating film of the gate.


Inventors:
LEE GA WON
Application Number:
JP2004186579A
Publication Date:
November 04, 2005
Filing Date:
June 24, 2004
Export Citation:
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Assignee:
HYNIX SEMICONDUCTOR INC
International Classes:
H01L29/423; H01L21/28; H01L21/76; H01L21/8234; H01L21/8242; H01L27/08; H01L27/088; H01L27/10; H01L27/105; H01L27/108; H01L29/49; (IPC1-7): H01L21/8234; H01L21/8242; H01L27/08; H01L27/088; H01L27/108; H01L29/423; H01L29/49
Attorney, Agent or Firm:
Kyosei International Patent Office