Title:
SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2017173147
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique that suitably corrects a phase deviation of a terahertz wave radiated from each of a plurality of inspection points on a semiconductor sample.SOLUTION: A semiconductor inspection device 100 comprises: a movement stage 3 that holds a solar battery 9; an inspection light emitting unit that irradiates a surface 9S of the solar battery 9 with pulsed inspection light LP11 to generate a terahertz wave LT1; a terahertz wave detector 231 that detects the terahertz wave LT1 radiated on a surface 9S side in response to input of pulsed inspection light LP12; a delay unit 24 that delays a time at which the inspection light LP12 reaches the terahertz wave detector 231; and a length meter 25 that measures a vertical position, on a surface 9S, of a measurement position MP different from an irradiation position IP irradiated with the inspection light. A control unit 7 controls the delay unit 24 in accordance with the vertical position measured by the length meter 25.SELECTED DRAWING: Figure 2
Inventors:
FUJITA HIROSHI
Application Number:
JP2016059940A
Publication Date:
September 28, 2017
Filing Date:
March 24, 2016
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD
International Classes:
G01N21/3581; G01M11/00; G01N21/95
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita