SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE

Title:

SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE

Document Type and Number:

Japanese Patent JPH08340090

Kind Code:

A

Abstract:

PURPOSE: To improve the withstand voltage of a capacitor provided with a capacitor insulating film composed of a ceramic thin film having a perovskite structure by reducing the leakage current of the capacitor.

CONSTITUTION: A ferroelectric capacitor composed of a lower electrode 13A, a ceramic capacitor film 14A composed of a ferroelectric substance, and an upper electrode 15A is formed on a base insulating film 12 formed on a semiconductor substrate 11. On the substrate 11, in addition, an interlayer insulating film 16 is formed so as to cover the capacitor and electrode wiring 17 is formed on the film 16. The relation between the surface length L of a ceramic capacitor film 14A formed between the intersection of the side face of the upper electrode 15A with the upper surface of the ceramic capacitor film 14A and that of the side face of the film 14A with the upper surface of the lower electrode 13A and the thickness D of the film 14A is set in a relation, L≥2D.

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Inventors:

NOMA JUNJI
UEDA DAISUKE

Application Number:

JP14626395A

Publication Date:

December 24, 1996

Filing Date:

June 13, 1995

Export Citation:

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Assignee:

MATSUSHITA ELECTRONICS CORP

International Classes:

H01G4/12; H01L21/822; H01L21/8242; H01L21/8246; H01L21/8247; H01L27/04; H01L27/10; H01L27/105; H01L27/108; H01L29/788; H01L29/792; H01L29/92; (IPC1-7): H01L27/108; H01L21/8242; H01G4/12; H01L27/04; H01L21/822; H01L27/10; H01L21/8247; H01L29/788; H01L29/792

Attorney, Agent or Firm:

Hiroshi Maeda (2 outside)

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