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Title:
SEMICONDUCTOR LASER DEVICE
Document Type and Number:
Japanese Patent JPH1126880
Kind Code:
A
Abstract:

To suppress diffusion of carriers to an active layer by obtaining a carrier diffusion suppressing layer of the carrier concentration lower than that of a third clad layer.

First, on an n-type substrate 1, an n-type first clad layer 3, an active layer 4, a low concentration p-type second clad layer 5, a p-type etching stopping layer 6, a (low concentration) p-type AlGaInP layer 7, a (high concentration p-type) AlGaInP layer 8 and a p-type GaAs contact layer 12 are grown in this order. Then a ridge structure 10 is formed on the surface of the p-type GaAs layer 12. Then an n-type current stopping layer 11 is bury- grown, and the p-type contact layer 12 is formed. After this, an n-type electrode 13 is formed on the rear surface of the substrate 1, and a p-type electrode 14 is formed on the front surface of the contact layer 12, to obtain a semiconductor laser device. At this time, because a carrier diffusion suppressing layer 7 is provided between the high concentration p-type third clad layer 8 and the low concentration p-type second clad layer 5, diffusion of carriers to the active layer 4 is suppressed, and life properties of the laser is improved.


Inventors:
ONO KENICHI
Application Number:
JP17829897A
Publication Date:
January 29, 1999
Filing Date:
July 03, 1997
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L33/06; H01L33/12; H01L33/14; H01L33/30; H01S5/00; (IPC1-7): H01S3/18; H01L33/00
Domestic Patent References:
JP58073670B
JP61184372B
Attorney, Agent or Firm:
Kaneo Miyata (2 outside)



 
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