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Title:
SEMICONDUCTOR LASER DIODE AND MANUFACTURING METHOD OF THE SAME
Document Type and Number:
Japanese Patent JP2013110267
Kind Code:
A
Abstract:

To provide a semiconductor laser diode and a manufacturing method of the same, which can inhibit crystal cracks in cleavage time.

A semiconductor laser diode of an embodiment comprises: a substrate 14; an active layer 26 formed above the substrate 14; a semiconductor layer 28 formed on the active layer 26; a front-end-face high-resistance part 28a formed by cutting a part of interstitial bond in the semiconductor layer 28 at a portion including a front end face 12a and having higher resistance than that of a portion where the interstitial bond is not cut; a rear-end-face high-resistance part 28b formed by cutting a part of interstitial bond in the semiconductor layer 28 at a portion including a rear end face 12b and having higher resistance than that of a portion where the interstitial bond is not cut; and an electrode 38 formed on the semiconductor layer 28 so as to have a portion that does not directly contact the front-end-face high-resistance part 28a in the front end surface 12a, and have a portion that does not directly contact the rear-end-face high-resistance part 28b in the rear end surface 12b.


Inventors:
MOTODA TAKASHI
Application Number:
JP2011254015A
Publication Date:
June 06, 2013
Filing Date:
November 21, 2011
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01S5/042
Domestic Patent References:
JPH11233874A1999-08-27
JPH03297187A1991-12-27
JPH1027939A1998-01-27
JPS6170781A1986-04-11
JPS5079287A1975-06-27
JP2004134701A2004-04-30
JPH1126866A1999-01-29
JPH08279649A1996-10-22
JPH0923037A1997-01-21
JPH09293928A1997-11-11
JP2001094207A2001-04-06
JP2001015859A2001-01-19
Attorney, Agent or Firm:
Mamoru Takada
Hideki Takahashi
Yoshimi Kuno