To provide a substrate transfer apparatus of simple configuration capable of separating a glass substrate more reliably from a tray by using a lift arm.

A substrate transfer apparatus 1A for transferring a glass substrate 200 mounted on a tray 100 by separating the glass substrate 200 from the tray 100 comprises: a support 20 for supporting the tray 100 while opening the peripheral edge thereof; a press pin 14 for creating a clearance between the peripheral edges of the tray 100 and the glass substrate 200 by deflecting and deforming the peripheral edge of the tray 100 downward; and a lift arm 13 which is inserted into the clearance created between the peripheral edges of the tray 100 and the glass substrate 200 from the side, and separating the glass substrate 200 from the tray 100 by supporting the peripheral edge of the glass substrate 200 from below.