Title:
SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JP3894513
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To minimize the reticle replacing time by placing at least an SMIF indexer at a reticle transfer height enough to take out a substrate from an SMID pod with its door opened to carry the pod between the indexer and mount.
SOLUTION: A reticle SMIF indexer 2 is disposed at a front left part of an aligner chamber 2 and its pot mounting face is higher by a given amount from the reticle transfer height. At a front left part of the chamber 1 a pot mount 3 and mount lift 4 to move the mount 3 up and down from near a height of 800mm above the floor to near the pod mount face height of the indexer 2. Above the indexer 2 and lift 4 a robot hand 5 and vertically and horizontally moving means 6 are disposed to thereby minimize the reticle replacing time and reticle contamination during carrying.
Inventors:
Kohei Yamada
Application Number:
JP5711197A
Publication Date:
March 22, 2007
Filing Date:
February 26, 1997
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/677; G03F7/20; H01L21/02; H01L21/027; (IPC1-7): H01L21/68; H01L21/02; H01L21/027
Domestic Patent References:
| JP7297257A | ||||
| JP8279546A | ||||
| JP5270610A | ||||
| JP7176589A | ||||
| JP63022448A | ||||
| JP8051136A |
Attorney, Agent or Firm:
Tetsuya Ito
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