Title:
SEMICONDUCTOR PRESSURE SENSOR AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2002005765
Kind Code:
A
Abstract:
To provide a semiconductor pressure sensor and its manufacturing method having excellent pressure resistance and rarely causing the displacement of a sensitive element.
This semiconductor pressure sensor is provided with a sensitive section 8 constituted of a thin section 7 and inclination sections 6 and a thick section 9 supporting the sensitive section 8. The inclination sections 6 forming the sensitive section 8 have at least the inclination sections 6 of two stages.
Inventors:
EDA KAZUO
MIYAJIMA HISAKAZU
AOKI AKIRA
MIYAJIMA HISAKAZU
AOKI AKIRA
Application Number:
JP2000188608A
Publication Date:
January 09, 2002
Filing Date:
June 23, 2000
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
G01L9/04; G01L9/00; H01L21/308; H01L29/84; (IPC1-7): G01L9/04; H01L21/308; H01L29/84
Attorney, Agent or Firm:
Junji Ando (1 person outside)
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