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Title:
SEMICONDUCTOR PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH0755619
Kind Code:
A
Abstract:

PURPOSE: To eliminate the influence by a metal wiring and improve detecting precision by designing the form and direction of the metal wiring.

CONSTITUTION: Four diffusion leads 20 are formed substantially at equal intervals in the circumferential direction on the outside of a diaphragm 2 on the surface of a semiconductor substrate 1 to mutually connect adjacent radial differential pressure detecting gauges 3A and circumferential differential pressure detecting gauges 3B. One-side ends of metal wirings 21 formed by evaporation of aluminum are connected to the diffused leads 20, respectively. The diffused leads 20 are formed in U-shape so that lead bodies 20a cross the diffusion resistance layers 3a of the differential pressure detecting gauges 3A, 3B substantially at 45°, and connected to the diffusion resistance layers 3a of the adjacent sensors 3A, 3B. The metal wirings 21 are formed in the diagonal directions of the semiconductor substrate 1 in such a manner as to have substantially the equal distance from the diffusion resistance layers 3a, 3a of the adjacent differential pressure detecting gauges 3A, 3B, and one-side ends are connected to the centers of the lead bodies 20a of the diffusion leads 20.


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WO/2021/177024PRESSURE SENSOR
JPH03233334SEMICONDUCTOR PRESSURE SENSOR
Inventors:
OTANI KEIZO
Application Number:
JP21694193A
Publication Date:
March 03, 1995
Filing Date:
August 10, 1993
Export Citation:
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Assignee:
YAMATAKE HONEYWELL CO LTD
International Classes:
G01L9/04; G01L9/00; G01L13/06; H01L29/84; (IPC1-7): G01L13/06; G01L9/04; H01L29/84
Attorney, Agent or Firm:
Masaki Yamakawa



 
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