Title:
SENSING DEVICE AND METHOD OF PRODUCTION THEREOF
Document Type and Number:
Japanese Patent JP2019145798
Kind Code:
A
Abstract:
To provide a method for producing or fabricating a sensing device, or a method for producing or fabricating a sensor combined with a memristor.SOLUTION: A method comprises: depositing two bottom electrodes 202; depositing an active material 203 over the two bottom electrodes 202; partially or fully oxidizing part of the active material 203; and depositing one top electrode 205 on the partially or fully oxidized part (oxidized area 204) of the active material.SELECTED DRAWING: Figure 2
Inventors:
ALEXANDER ALEXANDROVICH BESSONOV
KIRIKOVA MARINA NIKOLAEVNA
KIRIKOVA MARINA NIKOLAEVNA
Application Number:
JP2019035098A
Publication Date:
August 29, 2019
Filing Date:
February 28, 2019
Export Citation:
Assignee:
NOKIA TECHNOLOGIES OY
International Classes:
H01L45/00; H01L21/8239; H01L27/105; H01L49/00; H01L51/05; H01L51/30
Domestic Patent References:
| JP2014075424A | 2014-04-24 | |||
| JP2013530535A | 2013-07-25 |
Foreign References:
| WO2012153818A1 | 2012-11-15 | |||
| WO2008001712A1 | 2008-01-03 |
Other References:
CARRARA, SANDRO: "Memristive-biosensors: A new detection method by using nanofabricated memristors", SENSORS AND ACTUATORS B: CHEMICAL, vol. B 171-172, JPN6018011441, 11 May 2012 (2012-05-11), pages 449 - 457, ISSN: 0004116862
Attorney, Agent or Firm:
Kawamori Mitsunori