To improve the detection accuracy by providing an acceleration detection element made of a pair of piezoelectric elements as well as flexible plate layed laterally on a support having a hollow part so as to support a weight at the hollow part of the support while it is provided in the vicinity of the weight.
A thee-axis sensor has a substrate 8 in which a flexible plate 3 is layed laterally on a support 2 having a hollow part 7 so as to support a weight 1 being a working body at the hollow part of the support 2. A piezoelectric element 19 having a piezoelectric body 11 on the substrate 8 in such a style that it is held between a lower electrode 9 and an upper electrode 10. The electrode 9 and the body 11 covers the whole surface of the plate 3, and thereon a pair of X-direction electrodes 13, a pair of Y-direction electrodes 14 and a pair of Z-direction electrodes 15 are formed so as to serve as X, Y, Z direction elements. In the X-direction electrodes 13 and the Y-direction electrodes 14, the paired electrode are mutually separated, respectively, while in the Z-direction electrodes 15 the paired electrodes are connected to each other.
SHIBATA KAZUYOSHI
ANDO HIDEKI
NGK OPTOCERAMICS CO LTD
Next Patent: ACCELERATION SENSOR