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Title:
SEPARATOR OF MULTIPLE LAYOUT ETCHING PRODUCT
Document Type and Number:
Japanese Patent JP3794829
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a separator for multiple layout etching products capable of surely and automatically separating the etching product without the occurrence of dancing in the etching products.
SOLUTION: This separator includes a sheet feeding-in truck 14 which is capable of transferring an etching product sheet 10 between a sheet mounting station 11 and a sheet separating station 13, a pair of sheet clamping means which hold both ends of the supporting frame of the etching product sheet 10, first and second bending force imparting means 20 and 22 which respectively and repetitively impart bending force to both side parts and central longitudinal rib of the supporting frame of the etching product sheet 10, a supporting frame discharging means 23 which discharges the supporting frame and an etching product discharging means 24 which discharges the etching product 12.


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Inventors:
Kiyoshi Sasada
Katsuhiko Oba
Kazuo Masuda
Toshihiko Ezaki
Application Number:
JP21187398A
Publication Date:
July 12, 2006
Filing Date:
July 10, 1998
Export Citation:
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Assignee:
Mitsui High Tech Co., Ltd.
International Classes:
C23F1/08; H01L23/50; (IPC1-7): C23F1/08; H01L23/50
Domestic Patent References:
JP2197584A
JP722554A
JP9245633A
JP717732U
JP3203292A
JP4243000A
Attorney, Agent or Firm:
Fujio Nakamae