Title:
SETUP METHOD
Document Type and Number:
Japanese Patent JP2016203352
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To set up a cutting blade in a short time by using a simple configuration without increasing the number of components.SOLUTION: There is provided a setup method for recognizing a position where the tip of a cutting blade comes into contact with the upper surface of a chuck table (15) during infeed in which a cutting blade (54) is made to cut into a plate-like workpiece (W). The setup method comprises: a step of forming a linear groove (71) by sliding the cutting blade and a dresser board (D) relatively in a rotational axis direction of the cutting blade; a step of measuring a groove width (W) at an end edge (73) of the groove at which the cutting blade separates from the dresser board; a step of calculating a radius (r) of the cutting blade from the groove width, an axial center height (h1) of the cutting blade when forming the groove and an upper surface height (h2) of the dresser board; and a step of setting up the cutting blade with respect to a chuck table by using the radius of the cutting blade.SELECTED DRAWING: Figure 5
Inventors:
SEKIGUCHI TAKEYA
Application Number:
JP2015091467A
Publication Date:
December 08, 2016
Filing Date:
April 28, 2015
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B24B49/12; B24B49/18; B24B53/00; H01L21/304
Domestic Patent References:
| JP2013027949A | 2013-02-07 | |||
| JP2013041972A | 2013-02-28 | |||
| JP2013082021A | 2013-05-09 | |||
| JP2011249571A | 2011-12-08 | |||
| JP2015030084A | 2015-02-16 | |||
| JP2010000588A | 2010-01-07 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi