Title:
形状測定装置、形状測定方法及び光学素子の製造方法
Document Type and Number:
Japanese Patent JP6685708
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a shape measurement device capable of easily acquiring an error in rotational movement of a placement part on which a measurement object is placed, and a shape measurement method and a manufacturing method of optical element.SOLUTION: When calculating an error in rotational movement of a placement part 10, a shape measurement device 1 acquires a piece of position information on the surface of the measurement object in a thrust direction while driving a rotation drive means 58 at least at three points where the inclination of surface of the measurement object, which has an axisymmetric aspherical shape is different from each other, and the central axis is aligned with rotation axis 59 of the rotation drive means 58. The error in rotational movement is calculated based on the acquired position information in the thrust direction and a piece of design data of normal vectors of the measurement object at each measurement position.SELECTED DRAWING: Figure 1
Inventors:
Susuke Soumura
Application Number:
JP2015234578A
Publication Date:
April 22, 2020
Filing Date:
December 01, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B21/20; G01B5/20
Domestic Patent References:
| JP2006322868A | ||||
| JP2005326344A |
Foreign References:
| US6327788 |
Attorney, Agent or Firm:
Chikajima International Patent Office
Kazuo Chikajima
Kazuo Chikajima