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Patent Searching and Data


Title:
SHUTTER CONTROL DEVICE
Document Type and Number:
Japanese Patent JPH04361522
Kind Code:
A
Abstract:

PURPOSE: To accurately control an exposure operation by a method wherein a residual light counter, with which the residual light is accurately and quantitatively measured, is provided, the residual light is measured by a computer used for control, and the correction of the residual light is added to exposure amount data which is different for every product lot.

CONSTITUTION: A residual light amount counter 16 counts the counter pulse 14 in proportion to the level of illumination from the point of time at which a shutter 2 started a closing movement. The amount of residual light is measured in advance by a controlling computer 7 before an article is exposed, and the new data of exposing amount, which is obtained by deducting the amount of residual light from the exposing-amount data to be set for every article, is set on a counter 8. As a result, the entire amount of exposure, including the amount of residual light, can be controlled. Also, the amount of residual light is measured every time the shutter 2 is moved, the result is compared with the last and the past data of measurement, a judgement is given, a motor is properly controlled, and as a result, a highly precise exposing amount control can be conducted.


Inventors:
OTSUKI SHIGEO
Application Number:
JP13752491A
Publication Date:
December 15, 1992
Filing Date:
June 10, 1991
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): G03F7/20; H01L21/027
Attorney, Agent or Firm:
Katsuo Ogawa