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Title:
SIEGBAHN TYPE VACUUM PUMP
Document Type and Number:
Japanese Patent JPH04148099
Kind Code:
A
Abstract:

PURPOSE: To obtain a higher exhaust capacity by forming spiral grooves in different directions, having twisting angles which become larger toward in the outward diametrical direction, and groove widths which are equal to each other or are decreased in the outward diametrical direction, on at least a pair of opposing surfaces of a rotary disc and a stationary disc which create an outward flow.

CONSTITUTION: A plurality of rotary discs 1a are provided at multiple stages on the outer peripheral surface of a rotor 1, and a plurality of stationary discs 2a are provided at multiple stages on the inner peripheral surface of a casing 2, and these discs 1a, 2a are faced to each other with slight gaps therebetween. Lands 17a and spiral grooves 2c are formed indifferent directions on the opposing surfaces of at least a pair of these rotary discs 1a and the stationary disc 2a, which create an outward stream, having twist angles that increase in the outward diametrical direction, and groove widths that are equal to each other but are decreased in the outward diametrical direction. Further, by rotating the rotor 1 and the rotary discs 1a, gas sucked through a suction port 8 is accelerated with the use of gas viscosity, and is swirled by the spiral grooves 2b so as to be exhausted through an exhaust port 9.


Inventors:
TAKESHITA KOJI
YOSHIDA ZENICHI
OTANI YUJI
Application Number:
JP27236190A
Publication Date:
May 21, 1992
Filing Date:
October 12, 1990
Export Citation:
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Assignee:
MITSUBISHI HEAVY IND LTD
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Domestic Patent References:
JPH0220798B21990-05-10
JP2099290B
JPS63147989A1988-06-20
JPS4733447A
Attorney, Agent or Firm:
Mitsuru Oba (4 outside)