Title:
真空ポンプ及び真空ポンプの堆積物検知装置並びに真空ポンプの堆積物検知方法
Document Type and Number:
Japanese Patent JP7057128
Kind Code:
B2
Abstract:
To provide a vacuum pump that can determine proper overhaul timing, and to provide a device for detecting deposit for a vacuum pump and a method for detecting deposit for a vacuum pump.SOLUTION: A vacuum pump 1 includes: a vibration sensor 82 for detecting contact between a rotor 20 and deposit; and control unit 60 determination means for detecting a current value of a motor 30 for rotatably driving the rotor 20 and, when the vibration sensor 82 detects contact between the rotor 20 and deposit while the current value is equal to or larger than a specified value, determining that the vacuum pump 1 needs overhaul.SELECTED DRAWING: Figure 3
Inventors:
Yoshihiro Enomoto
Application Number:
JP2017254060A
Publication Date:
April 19, 2022
Filing Date:
December 28, 2017
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F04B51/00; F04D27/00
Domestic Patent References:
| JP11062846A |
Foreign References:
| WO2010007975A1 | ||||
| WO2016076191A1 |
Attorney, Agent or Firm:
Takamitsu Shimizu
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