Title:
簡易ランプ設計
Document Type and Number:
Japanese Patent JP6382291
Kind Code:
B2
Abstract:
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
Inventors:
Lanish, Joseph M.
Application Number:
JP2016500596A
Publication Date:
August 29, 2018
Filing Date:
March 04, 2014
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01K1/66; H01K1/46; H01K7/00; H05B3/02; H05B3/06; H05B3/44
Domestic Patent References:
| JP48008982U | ||||
| JP49028369U | ||||
| JP59069477U | ||||
| JP2109233A | ||||
| JP382554U | ||||
| JP61103862U |
Foreign References:
| US4570104 |
Attorney, Agent or Firm:
Sonoda/Kobayashi Patent Business Corporation