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Title:
SLICE STAND, SINGLE CRYSTAL USING THE SAME AND CUTTING OF BULK MEMBER
Document Type and Number:
Japanese Patent JPH09300344
Kind Code:
A
Abstract:

To prevent the generation of the malfunction of a wire saw apparatus caused by the power leak of a slice stand by forming the slice stand for a single crystal bulk member by using electric insulating ceramics artificial wood.

A slice stand 1 is composed of electric insulating cermics artificial wood and an adhesive is applied to the upper surface of the slice stand 1 and a single crystal bulk member 2 is placed thereon to be bonded and fixed thereto. As the adhesive at this time, one developing adhesive capacity at room temp. and losing adhesive capacity in hot water at about 80-100°C is used. Even if a wire saw 3 cuts both side ends 1c, 1c of the slice stand 1, the slice stand 1 generates no power leak because has electric insulating properties and the whole of the apparatus generates no malfunction to continue predetermined cutting operation and the bulk member 2 is cut into a wafer having predetermined thickness.


Inventors:
HAGITANI HIROMICHI
Application Number:
JP14966396A
Publication Date:
November 25, 1997
Filing Date:
May 09, 1996
Export Citation:
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Assignee:
HAGITANI HIROMICHI
International Classes:
B28D5/04; B28D5/00; B28D7/04; H01L21/304; (IPC1-7): B28D7/04; B28D5/04; H01L21/304