Title:
SLIDING MEMBER, METHOD FOR MANUFACTURING THE SAME, AND SLIDING STRUCTURE
Document Type and Number:
Japanese Patent JP2013057093
Kind Code:
A
Abstract:
To provide a sliding member capable of securing a lower friction coefficient than that of conventional ones in the atmosphere and a method for producing the sliding member.
The method for producing the sliding member is used for forming an amorphous carbon film containing nitrogen on a surface of a substrate. In the method, by irradiating nitrogen ion beams to the surface of the substrate and irradiating electronic beams to a carbon target in such a way that a plurality of projection parts is formed on the surface of the amorphous carbon film, the amorphous film is formed while a part of the carbon target is deposited on the surface of the substrate.
Inventors:
FUWA YOSHIO
JINNO TETSUSHI
UMEHARA TOKUJI
NOOIYAMA TAKAYUKI
SAKAKIBARA KAZUKI
JINNO TETSUSHI
UMEHARA TOKUJI
NOOIYAMA TAKAYUKI
SAKAKIBARA KAZUKI
Application Number:
JP2011195055A
Publication Date:
March 28, 2013
Filing Date:
September 07, 2011
Export Citation:
Assignee:
TOYOTA MOTOR CORP
UNIV NAGOYA
UNIV NAGOYA
International Classes:
C23C14/06
Domestic Patent References:
| JP2009013192A | 2009-01-22 | |||
| JPH11209868A | 1999-08-03 | |||
| JPH08225924A | 1996-09-03 | |||
| JPH1121663A | 1999-01-26 |
Other References:
JPN6015019813; 野老山貴行、齋藤諒介、梅原徳次、不破良雄: 'ＣＮｘ膜の硬さに及ぼす成膜時基板温度・窒素イオンビーム加速電圧・成膜速度の影響' 日本機械学会論文集（Ｃ編） ７７巻，７７５号, 20110325, ６２４-６３０
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Yasuhiko Mima
Sekiya Mitsuo
Yasuhiko Mima
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