To realize a high servo band, by setting gain of a position control system highest, for enhancing position control accuracy of a stage.

This slow motion stage has respectively three or more of top plates mountable with a base board, actuators for generating thrust in the vertical direction to a top plate surface, and actuators for generating the thrust in the horizontal direction to the top plate surface; and can move in 6 degrees of freedom in total of translational 3 degrees of freedom and rotational 3 degrees of freedom. A structure of the top plates is formed into a structure having the hollow inside. The hollow inside has a rib structure for enhancing a natural frequency to a torsional mode. An actuator moving piece is fixed to a rib side surface.