Title:
MINIATURE FLUID CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2018109407
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a miniature fluid control device applied to a portable or wearable apparatus or equipment.SOLUTION: A miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator installed in the lamination state. The gas inlet plate includes at least one gas inlet hole, at least one convergence array, and a circular cavity portion which forms a convergence chamber. The resonance plate has a hollow aperture. The piezoelectric actuator includes a suspension plate and a piezoelectric plate, and the suspension plate has a circular bulge portion corresponded to the circular cavity portion. By changing a relation ratio of work characteristic of a transmission air pressure formed by correspondence between the circular cavity portion and the circular bulge portion, a flow rate of transmitted air pressure is improved, and performance of the miniature fluid control device is improved.SELECTED DRAWING: Figure 4A
Inventors:
LIAO HUNG-HSIN
CHIN SEISHIYOU
LIAO JIA-YU
HAN YUNG-LUNG
HUANG CHI-FENG
LEE WEI-MING
CHIN SEISHIYOU
LIAO JIA-YU
HAN YUNG-LUNG
HUANG CHI-FENG
LEE WEI-MING
Application Number:
JP2018000322A
Publication Date:
July 12, 2018
Filing Date:
January 04, 2018
Export Citation:
Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
F04B45/047; F04B45/04; H01L41/09
Attorney, Agent or Firm:
Hitoshi Shinbo