Title:
小型流体制御装置
Document Type and Number:
Japanese Patent JP6942475
Kind Code:
B2
Abstract:
A miniature fluid control device (1A) includes a gas inlet plate (11), a resonance plate (12) and a piezoelectric actuator (13). The gas inlet plate (11) includes at least one inlet (110), at least one convergence channel (112) and a central cavity (111). A convergence chamber is defined by the central cavity (111). The resonance plate (12) has a central aperture (120). The piezoelectric actuator (13) includes a suspension plate (130), an outer frame (131) and a piezoelectric ceramic plate (133). A gap is formed between the resonance plate (12) and the piezoelectric actuator (13) to define a first chamber (121). When the piezoelectric actuator (13) is driven and after the gas is fed into the miniature fluid control device (1A) through the inlet (110) of the gas inlet plate (11), the gas is sequentially converged to the central cavity (111) through the convergence channel (112), transferred through the central aperture (120) of the resonance plate (12), introduced into the first chamber (121), transferred downwardly through the piezoelectric actuator (13), and exited from the miniature fluid control device (1A).
Inventors:
Chen Sechang
黄 ▲けい▼峰
Han Yong Long
House
Toshihiro Chen
Huang Tetsui
Konobu
Chen Asahi
Politics
Zhang Yinglin
Zhang Jia Go
Lee
黄 ▲けい▼峰
Han Yong Long
House
Toshihiro Chen
Huang Tetsui
Konobu
Chen Asahi
Politics
Zhang Yinglin
Zhang Jia Go
Lee
Application Number:
JP2017010017A
Publication Date:
September 29, 2021
Filing Date:
January 24, 2017
Export Citation:
Assignee:
Microjet Technology Co.,Ltd.
International Classes:
F04B45/047; B06B1/06; F16K31/02; H01L41/09; H02N2/04
Domestic Patent References:
| JP200854367A | ||||
| JP2009293566A | ||||
| JP2013245649A |
Foreign References:
| US20140377099 | ||||
| WO2015087086A1 |
Attorney, Agent or Firm:
Hitoshi Shinbo