To surely connect a part between a function part and the outside, and seal a closed space.

An upper substrate 1 and a lower substrate 3 are face-bonded to the surface and the rear of a silicon substrate 2, respectively. An angular velocity detecting part 12 is accommodated in a closed space 4. An electrode 19 for detection, which faces the detecting part 12, is formed on the surface of the lower substrate 3. A lead part 19A of the electrode 19 is pinched by the lower substrate 3 and an electrode pinching part 18 of the silicon substrate 2. A ventilation line interconnected with the closed space 4 is formed in the vicinity of the side surface of the lead part 19A. The ventilation line is interconnected with an interconnection hole 22 which opens to the lower substrate 3. A gas in the closed space 4 is discharged through the ventilation line and the interconnection hole 22. A conducting film 23 is formed in the interconnection hole 22 and is electrically connected with the electrode 19 for detection, and the ventilation line can be sealed.