To measure a solid surface temperature in a non-contact manner and in real time.
Probe laser light P emitted from a probe laser device 7 passes over an irradiation position of a pulse laser L on the surface of a sample 6, in a state that it is converted to parallel light by a collimator lens 8. A light-receiving optical system 9 condenses a fundamental wave of the probe laser light P, and a weak diffraction light component that generates by being deflected by a thermal wave generating on the irradiation position of the pulse laser L on the surface of the sample 6. An optical detector 10 receives a minute diffraction light component separated from the condensed fundamental wave, and outputs an electric signal corresponding to the amount of light. A signal processing circuit 11 calculates the temperature by applying the value of the electrical signal to a relational expression.
| JPS57199098 | OPTICAL MEASURING APPARATUS |
| JPH02254328 | TEMPERATURE MEASURING METHOD |
| JPH01221628 | TEMPERATURE SENSOR |
SONODA YOSHITO
MITSUKI FUMIAKI
IKEGAMI TOMOAKI
SONODA YOSHITO
MITSUKI FUMIAKI
IKEGAMI TOMOAKI
| JPS63200038A | 1988-08-18 | |||
| JP2004245674A | 2004-09-02 |