Title:
SPATIAL LIGHT MODULATION UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2011222856
Kind Code:
A
Abstract:
To provide a spatial light modulation unit capable of making a desired pupil intensity distribution accurately.
The spatial light modulation unit (3), used in an illumination optical system to illuminate a surface to be illuminated with light from a light source, comprises: spatial light modulation devices (31,32) having multiple mirror elements (31a,32a) arranged two-dimensionally and controlled individually; and a change device to change tilts of array surfaces of the multiple mirror elements. The change device has stages (33,34) tiltable while supporting bases of the multiple mirror elements.
Inventors:
FUJII TORU
Application Number:
JP2010092270A
Publication Date:
November 04, 2011
Filing Date:
April 13, 2010
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B19/00; G03F7/20
Domestic Patent References:
| JP2009111369A | 2009-05-21 | |||
| JP2006041530A | 2006-02-09 | |||
| JP2007007660A | 2007-01-18 |
Foreign References:
| WO2009125511A1 | 2009-10-15 | |||
| WO2008004664A1 | 2008-01-10 | |||
| WO2009125511A1 | 2009-10-15 |
Attorney, Agent or Firm:
Takao Yamaguchi