To provide a storage device capable of removing even contamination due to chemical absorption and/or physical adsorption, etc.

A specimen holder storage device comprises: a chamber; a vacuum exhaust port provided on the chamber; vacuum means for producing a vacuum in the chamber by vacuum evacuation from the vacuum exhaust port; a desorption and absorption prevention light source for chemically and/or physically adsorbed matter; and a specimen holder insertion port provided on the chamber. In a preferred embodiment of the specimen holder storage device, the chamber is made of glass.