PURPOSE: To lengthen the life of a machine by eliminating the mechanical wear of a coupling portion between a drive shaft and a spindle by providing a magnet coupling for transmitting the rotation of the drive shaft to the spindle by magnetic coupling in contactless state between the drive shaft and spindle.
CONSTITUTION: When a first rotation transmission member 16 and a second rotation transmission member 22 are oppositely located each other, magnetic field will be generated with 2 magnetic loops at the upper and lower sides and four loops in total as shown by the arrows 26. This magnetic filed makes magnetic coupling between both of them in contactless state. When a motor 15 turns under the state where a drive portion 10A corresponds to a follower 10B and the drive shaft 15a is rotated, this rotation is transmitted in contactless state to a spindle 19 at the side of the follower 10B through the magnetic coupling between the first rotation transmission member 16 and the second rotation transmission member 22, and a disk 12 chucked by a vacuum chuck 21 is rotated. By doing this, no dust is generated from contact, and thus a high degree of cleanness can be kept.
| WO/2015/053005 | MAGNETIC GEAR UNIT |
| JPS6235139 | CONTROL SYSTEM FOR ROTARY DRIVER |
SENDA HIRONORI
IIDA NOBUHIKO
KONNO MASAYUKI
SONY MAGNESCALE INC
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