Title:
STAGE MOVING DEVICE
Document Type and Number:
Japanese Patent JP2002031590
Kind Code:
A
Abstract:
To provide a stage moving device capable of moving a stage largely with a small force.
As for approach of a probe 16 to a sample 18, a moving rod 14 abutting on the rear side surface c of a stage 6 is moved in the arrow B direction in the figure 4 by a moving rod driving mechanism 13. Then, the stage 6 pulled in the reverse B direction by a spring 11 is moved on rails 5a, 5b as much as the same moving quantity as the moving rod 14 in the approaching direction B to the sample 6 against the force. Sliding members 22a, 22b, 22c, 22d are moved in parallel on rails 20, 21 as much as the same moving quantity as the stage 6 in the same direction as the stage 6, simultaneously following the movement of the stage 6.
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Inventors:
SUZUKI KATSUYUKI
Application Number:
JP2000213899A
Publication Date:
January 31, 2002
Filing Date:
July 14, 2000
Export Citation:
Assignee:
JEOL LTD
International Classes:
G01B21/00; G01N1/28; G01Q10/02; H01J37/20; (IPC1-7): G01N13/10; G01B21/00; H01J37/20
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