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Title:
STAGE FOR OPTICAL DEVICE, DEFECT INSPECTING DEVICE, AND THE OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP2005181194
Kind Code:
A
Abstract:

To provide a stage for optical devices and an optical stage using it, capable of accurately carrying out observations, measurements or the like.

The stage 13 for the optical devices is equipped with a mount surface 13a, which is subjected to optical polishing and on which a substrate 14 is mounted, and a hole 21 formed in the mount surface 13a. The hole 21 has a chamfered section 21b, formed by chamfering on the side of the mount surface 13a, and the chamfer section 21b is subjected to the optical polishing, and a plane, intersecting with the mount surface 13a of the hole 21, is made to inclined downward from the mount surface 13a.


Inventors:
MACHIDA KOJI
Application Number:
JP2003424887A
Publication Date:
July 07, 2005
Filing Date:
December 22, 2003
Export Citation:
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Assignee:
LASERTEC CORP
International Classes:
G01N21/958; G01M11/00; G01M11/04; (IPC1-7): G01M11/04; G01M11/00; G01N21/958
Attorney, Agent or Firm:
Ken Ieiri