To provide a static pressure gas bearing spindle capable of restraining the occurrence of damage by discharge, by restraining accumulation of electric charge in a bearing sleeve, while sufficiently securing the function of sealing an annular space by an insulating elastic member and damping whirling vibration of a rotary shaft.
This static pressure gas bearing spindle 1 has the rotary shaft 10, the bearing sleeve 20 arranged so as to surround an outer peripheral surface of the rotary shaft 10, a housing 30 surrounding the bearing sleeve 20 and supporting the bearing sleeve 20, and an O ring 41 composed of nitrile rubber arranged between the bearing sleeve 20 and the housing 30. A plate spring 61 having elasticity and electrically connecting the bearing sleeve 20 and the housing 30 by being composed of an electric conductor, is arranged between the bearing sleeve 20 and the housing 30. An elastic modulus of the plate spring 61 is set smaller than an elastic modulus of the O ring 41.
| JPH08219159A | 1996-08-27 | |||
| JPH09303397A | 1997-11-25 | |||
| JP2001252770A | 2001-09-18 | |||
| JPH0436125A | 1992-02-06 | |||
| JPH06288410A | 1994-10-11 | |||
| JPH0724739A | 1995-01-27 | |||
| JP2002295470A | 2002-10-09 | |||
| JP2002102750A | 2002-04-09 |
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
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