Title:
STORAGE AND RELEASE SYSTEM OF LEWIS BASE GAS
Document Type and Number:
Japanese Patent JP2006002939
Kind Code:
A
Abstract:
To improve a low pressure storage and release system for Lewis base gas, particularly, toxic special gas, for example, phosphine and arsine used in an electronics industry.
The Lewis base gas is stored in liquid including a reactive compound having a Lewis acid capable of performing reversible reaction between the Lewis base gases. The reactive compound includes reactive species dissolved, suspended, dispersed or mixed in a nonvolatile liquid.
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Inventors:
TEMPEL DANIEL JOSEPH
PHILLIP BRUCE HENDERSON
BRZOZOWSKI JEFFREY R
PEARLSTEIN RONALD MARTIN
GAFFNEY THOMAS RICHARD
PHILLIP BRUCE HENDERSON
BRZOZOWSKI JEFFREY R
PEARLSTEIN RONALD MARTIN
GAFFNEY THOMAS RICHARD
Application Number:
JP2005173618A
Publication Date:
January 05, 2006
Filing Date:
June 14, 2005
Export Citation:
Assignee:
AIR PROD & CHEM
International Classes:
F17C11/00
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
Takashi Ishida
Tetsuji Koga
Nagasaka Tomoyasu
Masaya Nishiyama
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