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Title:
STRAIGHTNESS MEASURING APPARATUS OF DIRECT-ACTING UNIT
Document Type and Number:
Japanese Patent JP2001356011
Kind Code:
A
Abstract:

To provide an apparatus for simultaneously measuring a straightly acting motion and rotary angle error and a rotary angle error of a direct-acting table or another direct-acting unit without contact by utilizing a linearity of a laser beam.

A straightness measuring apparatus of the direct-acting unit comprises a horizontal parallel double mirror having two reflecting mirrors disposed in a horizontal plane in a state in which the mirrors are separated at a distance (√2)d from each other and reflecting surfaces are opposed, a vertical parallel double mirror having two reflecting mirrors disposed in a vertical plane in a state in which the mirrors are separated at a distance (√2)d from each other and reflecting surfaces are opposed, and a light source for generating the laser beam, a semitransparent mirror for splitting the beam, an optical path changing reflecting mirror for changing a direction of the beam and a position sensor for detecting a position of the reflected light from the horizontal parallel double mirror and the vertical parallel double mirror of a corner cube reflecting mirror at fixed positions out of the direct-acting unit.


Inventors:
TENJINBAYASHI KOJI
Application Number:
JP2000176973A
Publication Date:
December 26, 2001
Filing Date:
June 13, 2000
Export Citation:
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Assignee:
NAT INST OF ADV IND & TECHNOL
International Classes:
G01B11/26; G01B11/00; (IPC1-7): G01B11/26; G01B11/00