Title:
昇華装置及び昇華方法
Document Type and Number:
Japanese Patent JP7390703
Kind Code:
B2
Abstract:
To provide a sublimation device and a sublimation method that can effectively enhance sublimation efficiency without deteriorating the quality of a specimen to be tested.SOLUTION: The sublimation device comprises a vacuum container disposed in a microwave radiation space to store a solid treating object, and microwave heating means that radiates a microwave to form a standing wave in the microwave radiation space. The device heats the treating object with the standing microwave while at least a portion of the treating object is sublimating. A sublimation method is also provided.SELECTED DRAWING: Figure 1
Inventors:
Masaki Nishioka
Masato Miyagawa
Masato Miyagawa
Application Number:
JP2019184553A
Publication Date:
December 04, 2023
Filing Date:
October 07, 2019
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
F26B5/06; F26B3/347
Domestic Patent References:
JP2013059750A | ||||
JP2019140103A | ||||
JP2018169083A | ||||
JP2013221667A | ||||
JP2018516354A | ||||
JP5238718A | ||||
JP2019136771A |
Attorney, Agent or Firm:
Patent Attorney Corporation Iida and Partners
Toshizo Iida
Shuichi Akabane
Toshizo Iida
Shuichi Akabane
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