Title:
加熱装置
Document Type and Number:
Japanese Patent JP7390702
Kind Code:
B2
Abstract:
To provide a heating apparatus that achieves high in-plane temperature uniformity of a large-area plate-shaped or a sheet-shaped object to be heated.SOLUTION: A heating apparatus includes a plurality of rectangular heating plates, and a heating space for accommodating an object to be heated, which is defined by the heating surfaces of the heating plates facing each other in the vertical direction, and each of the heating plates includes a rectangular metal plate and a plurality of planar heaters 11A to 11E built in the metal plate, and the plurality of planar heaters 11A to 11E are composed of a central surface heater 11A arranged in the center region of the metal plate, and a plurality of outer peripheral surface heaters 11B to 11E surrounding the outer periphery of the central surface heater.SELECTED DRAWING: Figure 6
Inventors:
Lee Eulsong
Masahito Yamanaka
Masahito Yamanaka
Application Number:
JP2019181863A
Publication Date:
December 04, 2023
Filing Date:
October 02, 2019
Export Citation:
Assignee:
Kyushu Nissho Co., Ltd.
International Classes:
H05B3/00; G02F1/13
Domestic Patent References:
| JP2010249923A | ||||
| JP2001317872A | ||||
| JP2008130356A | ||||
| JP2013023906A | ||||
| JP3060663U |
Attorney, Agent or Firm:
Patent Attorney Corporation KEN Intellectual Property General Office