To provide a substrate carrier robot capable of improving positioning precision and preventing interference with an outside object.
First ad second arms 36, 37 are provided free to revolve relatively with each other. A second revolving driving means 42 is provided at a joint between the first and second arms 36, 37. The second revolving driving means 42 has a second motor 76 and a second motive power transmitting part 77. The second motor 76 has a fixing part 78 fixed to the first arm 36 and a rotating part 79 to rotate around a rotating axis L22 roughly in parallel with the extending direction of the first arm 36 with respect to the fixing part 78. The second motive power transmitting part 77 is interposed between the second motor 76 and the second arm 37 and transmits the motive power of the second motor 76 to the second arm 37 from the rotating part 79 of the second motor 76. The first and second arms 36, 37 are revolved and driven relatively with each other by the second revolving driving means 42.
YOSHIDA TOSHIAKI
YOSHIDA TETSUYA
| JPH1133949A | 1999-02-09 | |||
| JP2000141272A | 2000-05-23 | |||
| JP2005039047A | 2005-02-10 | |||
| JPS63272474A | 1988-11-09 |
Takeshi Sugiyama