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Title:
SUBSTRATE CARRYING POSITION CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2011037587
Kind Code:
A
Abstract:

To provide a substrate carrying position control device capable of quickly and reliably displacing the carrying position of a flexible substrate in a desired direction while eliminating the need for installing a new installation for controlling the carrying position of the flexible substrate and keeping the construction of an existing carrying line as it is.

The substrate carrying position control device includes a curvature radius variable roll 1 for imparting tension to the flexible substrate 10 to carry the flexible substrate 10 along the longitudinal direction. The curvature radius variable roll 1 partly varies its curvature radius in the axial direction for giving distribution to tension produced with the flexible substrate 10 contacting it, in the cross direction of the flexible substrate 10 to change the carrying position of the flexible substrate 10.


Inventors:
SAWAYANAGI SATORU
Application Number:
JP2009186510A
Publication Date:
February 24, 2011
Filing Date:
August 11, 2009
Export Citation:
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Assignee:
FUJI ELECTRIC HOLDINGS
International Classes:
B65H23/038; B65H20/02; B65H27/00; C23C16/54; H01L21/677; H01L31/04
Attorney, Agent or Firm:
Shoichi Okuyama
Arihara Koichi
Matsushima Tetsuo
Hidefumi Kawamura
Naomi Yoshida
Ayako Nakamura
Fukagawa Eri
Satoshi Morimoto
Kyoko Tsunoda
Takashi Matsuzaki
Hirose Miki



 
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