Title:
基板乾燥装置および基板乾燥方法
Document Type and Number:
Japanese Patent JP6427323
Kind Code:
B2
Inventors:
Yosuke Hanawa
Application Number:
JP2014035093A
Publication Date:
November 21, 2018
Filing Date:
February 26, 2014
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/304; F26B5/16
Domestic Patent References:
| JP2013016699A | ||||
| JP2013258272A | ||||
| JP2012243869A | ||||
| JP2009113258A |
Attorney, Agent or Firm:
Kakusho Shoichi
Kazumasa Onishi
Kazumasa Onishi