Title:
SUBSTRATE HOLDER AND EXPOSURE DEVICE USING SUBSTRATE HOLDER
Document Type and Number:
Japanese Patent JP3173928
Kind Code:
B2
Abstract:
PURPOSE: To realize a substrate holder not only capable of ensuring sufficient suction force even in a decompression chamber but also capable of miniaturizing a mechanism rolling a substrate and an exposure device using the substrate holder.
CONSTITUTION: A bearing 1b supported to a baseplate 1 rotatably supports a rotor 3 unified with a first suction plate 4, and the rotor 3 is rotated by a DC servomotor 7. A second suction plate 6 arranged outside the first suction plate 4 is supported to the baseplate 1 through a double acting cylinder 5. The second suction plate is retreated by the double acting cylinder 5, and the central section of a substrate is sucked onto the first suction plate 4. The positional displacement of the substrate is detected, the DC servomotor 7 is driven, the first suction plate 4 is turned, the positional displacement of the substrate is removed, the double acting cylinder 5 is driven, the second suction plate 6 is moved forward, and the outer circumferential section of the substrate is sucked.
Inventors:
Yuji Chiba
Koji Marumo
Mr. Matsui
Shinichi Hara
Nobutoshi Mizusawa
Kazunori Iwamoto
Hiroshi Tanaka
Hiroshi Kurosawa
Koji Marumo
Mr. Matsui
Shinichi Hara
Nobutoshi Mizusawa
Kazunori Iwamoto
Hiroshi Tanaka
Hiroshi Kurosawa
Application Number:
JP23237593A
Publication Date:
June 04, 2001
Filing Date:
August 25, 1993
Export Citation:
Assignee:
Canon Inc
International Classes:
B23Q3/08; G03F7/20; G03F9/00; H01L21/027; H01L21/30; H01L21/683; (IPC1-7): H01L21/68; B23Q3/08; G03F7/20; H01L21/027
Domestic Patent References:
| JP2156622A | ||||
| JP4109251A | ||||
| JP413532A | ||||
| JP4174009A | ||||
| JP63155739A | ||||
| JP45646U |
Attorney, Agent or Firm:
Yoshiro Sakamoto