Title:
SUBSTRATE PLACING METHOD, AND CATCHER USED THEREFOR
Document Type and Number:
Japanese Patent JP3963347
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To place substrates of glass and ceramic on a placing plate without any deviation when carrying the substrates in a held condition by a catcher.
SOLUTION: In a method in which a substrate G is carried onto a placement plate S while holding the substrate G by claws 13 of a catcher 10 by using a robot having the catcher 10 with the opening/closing claws 13 facing each other in two directions orthogonal to each other on a tip of a turnable arm, and the substrate G is placed on the placing plate S with the claws 13 open, the catcher 10 is lowered until the claws 13 are brought into contact with the placing plate S, and the substrate G is dropped onto the placing plate S by opening the entire claws so that the claw 13 in at least one direction is opened in a small allowable range, and the catcher 10 is elevated after the air between the dropped substrate G and the placement plate S is removed to allow these to be tightly fitted to each other. Any positional deviation is suppressed by the claws 13 immediately in the vicinity of the dropped substrate G.
Inventors:
Hide Kurosawa
Application Number:
JP2001346026A
Publication Date:
August 22, 2007
Filing Date:
November 12, 2001
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
B25J13/00; B25J15/08; H01L21/677; H01L21/68; (IPC1-7): B25J13/00; B25J15/08; H01L21/68
Domestic Patent References:
| JP62048488A | ||||
| JP2000081283A | ||||
| JP60071181A | ||||
| JP47028656A | ||||
| JP4171188A | ||||
| JP2004785U |
Attorney, Agent or Firm:
Ikuo Doi
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