基板の研磨方法 - Hitachi Chemical Co., Ltd.

Title:

基板の研磨方法

Document Type and Number:

Japanese Patent JP4759779

Kind Code:

B2

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Inventors:

Yasushi Kurata
Yasuo Kami
Tsuyoshi Uchida
Hiroki Terasaki
Akiko Igarashi

Application Number:

JP25558499A

Publication Date:

August 31, 2011

Filing Date:

September 09, 1999

Export Citation:

Assignee:

Hitachi Chemical Co., Ltd.

International Classes:

H01L21/304; B24B37/00; C09K3/14; C09K13/00; H01L21/306

Domestic Patent References:

Attorney, Agent or Firm:

Hidekazu Miyoshi

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