Title:
基板処理装置及びノイズ影響低減方法
Document Type and Number:
Japanese Patent JP7446182
Kind Code:
B2
Abstract:
A substrate processing apparatus includes an AD converter configured to output digital values of a voltage applied to a heater resistor and a current flowing in the heater resistor; and a controller configured to control a temperature of the heater resistor by using a calculation voltage and a calculation current configured to calculate a resistance value of the heater resistor, which are obtained from an output result of the AD converter. The controller calculates at least one of the calculation voltage or the calculation current, based on a combination result of a digital signal obtained from the output result of the AD converter and a noise signal including a normal distribution noise.
Inventors:
Kazuto Yamada
Application Number:
JP2020142367A
Publication Date:
March 08, 2024
Filing Date:
August 26, 2020
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H01L21/205; H01L21/683; H05B3/00; H05H1/46
Domestic Patent References:
| JP20209795A | ||||
| JP4165642A | ||||
| JP2017228230A |
Attorney, Agent or Firm:
Sakai International Patent Office
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