Title:
SUBSTRATE PROCESSOR
Document Type and Number:
Japanese Patent JP3442934
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate processor which requires fewer nozzles with a simple arrangement.
SOLUTION: A resist stock solution supplied from a resist stock supply means through an a lower part 15a of a nozzle arm 15 as well as a solvent supplied from a solvent supply means through a piping 45 are mixed at a mixer 50, and then ejected from a nozzle 10 onto a substrate W through an upper part 15b of the arm. The upper part 15b of the nozzle arm 15 is provided therein with a viscometer 41. The resist solution mixed at the mixer 50 is measured by the viscometer 41 with respect to its viscosity, and the amount of solvent to be supplied from the solvent supply means is controlled on the basis of its measurement result to obtain a resist solution having a desired viscosity.
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Inventors:
Masami Ohtani
Application Number:
JP21840196A
Publication Date:
September 02, 2003
Filing Date:
August 20, 1996
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B01F5/04; B01F5/06; G03F7/16; B01F15/00; B05C11/08; B05C11/10; H01L21/027; B01F13/10; (IPC1-7): H01L21/027; B05C11/10; G03F7/16
Domestic Patent References:
| JP4209520A | ||||
| JP927442A | ||||
| JP6083327A | ||||
| JP474419U |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)
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