PURPOSE: To provide the device capable of uniformly treating the surface of a substrate by preventing the dripping of a processing soln. from a pipe and supplying the soln. to the surface of the substrate from plural spots of the pipe almost at the same time.
CONSTITUTION: Plural small tubes 4 are arranged with the intermediate part positioned higher than both ends, the one end is communicated with the apex of a pipe 3, and the tubes are respectively connected to the pipe 3. A check valve 50 is furnished between a pump 30 and the pipe 3, and, when a processing soln. L is discharged on the substrate surface, the soln. L sent from the pump 30 under pressure is supplied toward the substrate 2 from the small tubes 4 through the pipe 3. When the soln. L is not discharged on the substrate surface, the back flow of the soln. L from the pipe 3 to the pump 30 is prevented. When the supply of the soln. to the substrate surface is stopped, the whole inside of the pipe is always filled with the soln., and the soln. is discharged from the small tubes almost at the same time when the soln. is sent from the pump by pressure.
YOSHIDA KOZO
INOKUCHI DENICHI
Next Patent: Lightweight body construction for stringed instruments