To obtain a substrate transport device suitably applicable to a large glass substrate in which even a large and thin substrate is set in a substrate container and removed therefrom positively without increasing the size of the substrate container.
In the substrate transport device for fixing/removing a glass substrate 25 to/from a cassette 22 using an arm 30, the arm 30 has side part supporting arms 31A and 31B for supporting the opposite end parts of the glass substrate 25, and a central supporting arm 32 located between the pair of side part supporting arms 31A and 31B and supporting the substantially central part of the glass substrate 25. The side part supporting arms 31A and 31B and the central supporting arm 32 has a level difference corresponding to the profile of flexure of the glass substrate 25 contained in the cassette 22.