Title:
SUBSTRATE TRANSPORT DEVICE
Document Type and Number:
Japanese Patent JP2017186149
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To properly remove a cullet on an upper surface of a table in a substrate transport device.SOLUTION: A substrate transport device 1 is a device for transporting a fragile material substrate M from a first table 3 to a second table 5 and includes a transport body 7 and a second cleaning unit 11. The transport body 7 is disposed above the first table 3 and the second table 5 and moves from the first table 3 to the second table 5 while holding the substrate M. The second cleaning unit 11 integrally moves with the transport body 7 and cleans an upper surface 3a of the second table 5 during transportation.SELECTED DRAWING: Figure 9
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Inventors:
NISHIO JINKO
TAKAMATSU IKUYOSHI
TAKAMATSU IKUYOSHI
Application Number:
JP2016077904A
Publication Date:
October 12, 2017
Filing Date:
April 08, 2016
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
B65G49/06; B24B29/00; C03B33/03; H01L21/677
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